Browsing by Author Demidov, A.
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Issue Date | Title | Author(s) |
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2018 | Low-k sol-gel coating for surface planarization at integrated circuit production | Vaskevich, V.V.; Kovalenko, D.L.; Gaishun, V.E.; Khakhomov, S.A.; Demidov, A.; Mhin, S. |