| Title: | Low-k sol-gel coating for surface planarization at integrated circuit production |
| Authors: | Vaskevich, V.V. Kovalenko, D.L. Gaishun, V.E. Khakhomov, S.A. Demidov, A. Mhin, S. |
| Issue Date: | 2018 |
| Publisher: | Kaunas University of Technology |
| Citation: | Low-k sol-gel coating for surface planarization at integrated circuit production / V. Vaskevich [et al.] // Inter-Academia 2018 : the 17th International Conference on Global Research and Education (Kaunas, Lithuania, 24 – 27 September, 2018) ; Kaunas University of Technology. - Kaunas, 2018 - P. 54. |
| URI: | http://elib.gsu.by/jspui/handle/123456789/33112 |
| Appears in Collections: | Статьи |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Vaskevich_Low-k_sol-gel.pdf | 226.65 kB | Adobe PDF | View/Open |
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