Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Vaskevich, V.V. | - |
| dc.contributor.author | Kovalenko, D.L. | - |
| dc.contributor.author | Gaishun, V.E. | - |
| dc.contributor.author | Savitskaya, T.A. | - |
| dc.contributor.author | Васькевич, В.В. | - |
| dc.contributor.author | Коваленко, Д.Л. | - |
| dc.contributor.author | Гайшун, В.Е. | - |
| dc.date.accessioned | 2024-10-18T09:49:26Z | - |
| dc.date.available | 2024-10-18T09:49:26Z | - |
| dc.date.issued | 2012 | - |
| dc.identifier.citation | Sol-gel dielectric films for SOI technologies / V.V. Vaskevich, D.L. Kovalenko, V.E. Gaishun, T.A. Savitskaya // 6-th International Conference on Chemistry and Chemical Education “Sviridov Readings 2012”. - Minsk: Krasiko-Print, 2012. | ru |
| dc.identifier.uri | https://elib.gsu.by/handle123456789/69499 | - |
| dc.language.iso | en | ru |
| dc.publisher | Krasiko-Print | ru |
| dc.title | Sol-gel dielectric films for SOI technologies | ru |
| dc.type | Article | ru |
| dc.root | 6-th International Conference on Chemistry and Chemical Education “Sviridov Readings 2012” | ru |
| dc.placeOfPublication | Minsk | ru |
| Appears in Collections: | Статьи | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Vaskevich_Sol-gel.pdf | 34.49 kB | Adobe PDF | View/Open |
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