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Browsing by Author Demidov, A.
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
| 2018 | Low-k sol-gel coating for surface planarization at integrated circuit production | Vaskevich, V.V.; Kovalenko, D.L.; Gaishun, V.E.; Khakhomov, S.A.; Demidov, A.; Mhin, S.; Васькевич, В.В.; Коваленко, Д.Л.; Гайшун, В.Е.; Хахомов, С.А. |
