Structure and optical properties of a-C coatings doped with nitrogen and silicon

Abstract

Using a pulsed arc discharge, carbon coatings binary-doped with silicon and nitrogen are deposited on quartz and silicon substrates. The structure and phase composition of the coatings are studied by atomic force microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. The optic band gap Eg and the refractive index of the coatings are determined depending on the alloying elements. The influence of nitrogen and silicon on the formation of the structure of the carbon matrix and the formation of chemical compounds in the coatings, leading to a change in the width optic band gap Eg, has been established. Changes in the roughness Ra and the size of the Csp² cluster are shown in the case of binary doping with nitrogen and silicon.