Structure and properties of metal-carbon a-C coatings alloyed with Ti, Zr and Al with a high concentration

Abstract

The paper presents a comparative analysis of the structure and mechanical properties of carbon coatings, highly alloyed with metals Ti, Zr and Al. Coatings were deposited from combined flows of metal and carbon plasma with approximately the same mass content. The influence of the nature of the metal on the size of Csp² clusters and the degree of ordering of the carbon matrix has been determined by means of Raman spectroscopy. Using scanning electron microscopy, the features of the morphology of coatings due to the formation of a carbide phase have been evaluated. It is shown that the values of the Young modules (E) and the coefficient of elastic recovery (η) of the coatings are also determined by the nature of the metal phase: a higher hardness is achieved when alloying with titanium, and the η is achieved when alloying with aluminum