Градиентные металл-углеродные покрытия, формируемые импульсным катодно-дуговым осаждением

Abstract

Тhe method is proposed for the deposition of gradient coatings based on amorphous carbon and metals (Ti, Cr and Al) from combined flows of carbon and metal plasma. The distribution of elements over the thickness of the coating is determined by the energy modes of operation of sources of metal and carbon plasma. It is shown that in order to achieve optimal adhesion values, it is necessary to deposit a metal sublayer, followed by an increase in the concentration of the carbon component in the coating volume, leading to the formation of a pure amorphous "diamond-like" layer on the coating surface. The study of the phase composition, microstructure and mechanical properties of gradient coatings obtained under various energy modes of generation of plasma carbon flows has been carried out.