| Title: | Sol-gel dielectric films for SOI technologies |
| Authors: | Vaskevich, V.V. Kovalenko, D.L. Gaishun, V.E. Savitskaya, T.A. Васькевич, В.В. Коваленко, Д.Л. Гайшун, В.Е. |
| Issue Date: | 2012 |
| Publisher: | Krasiko-Print |
| Citation: | Sol-gel dielectric films for SOI technologies / V.V. Vaskevich, D.L. Kovalenko, V.E. Gaishun, T.A. Savitskaya // 6-th International Conference on Chemistry and Chemical Education “Sviridov Readings 2012”. - Minsk: Krasiko-Print, 2012. |
| URI: | https://elib.gsu.by/handle123456789/69499 |
| Appears in Collections: | Статьи |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Vaskevich_Sol-gel.pdf | 34.49 kB | Adobe PDF | View/Open |
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