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Репозиторий УО "Гомельский государственный университет имени Франциска Скорины"
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Периодические издания университета
Проблемы физики, математики, техники
Проблемы физики, математики, техники. Техника
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Issue Date
Title
Author(s)
2010
Прогнозирование эрозии мишени магнетронных распылительных систем
Голосов, Д.А.
;
Мельников, С.Н.
;
Кундас, С.П.
;
Достанко, А.П.
;
Golosov, D.A.
;
Melnikov, S.N.
;
Kundas, S.P.
;
Dostanko, A.P.
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Author
1
Dostanko, A.P.
1
Golosov, D.A.
1
Kundas, S.P.
1
Melnikov, S.N.
1
Голосов, Д.А.
1
Достанко, А.П.
1
Кундас, С.П.
Subject
1
erosion zone
1
magnetic field
1
magnetron sputtering system
1
modeling of discharge
1
зона эрозии мишени
1
магнетронная распылительная система
1
магнитное поле
1
моделирование разряда
1
плазменный разряд
Date issued
1
2010