Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Vaskevich, V.V. | - |
| dc.contributor.author | Kovalenko, D.L. | - |
| dc.contributor.author | Gaishun, V.E. | - |
| dc.contributor.author | Khakhomov, S.A. | - |
| dc.contributor.author | Demidov, A. | - |
| dc.contributor.author | Mhin, S. | - |
| dc.contributor.author | Васькевич, В.В. | - |
| dc.contributor.author | Коваленко, Д.Л. | - |
| dc.contributor.author | Гайшун, В.Е. | - |
| dc.contributor.author | Хахомов, С.А. | - |
| dc.date.accessioned | 2022-02-09T13:01:53Z | - |
| dc.date.available | 2022-02-09T13:01:53Z | - |
| dc.date.issued | 2018 | - |
| dc.identifier.citation | Low-k sol-gel coating for surface planarization at integrated circuit production / V. Vaskevich [et al.] // Inter-Academia 2018 : the 17th International Conference on Global Research and Education (Kaunas, Lithuania, 24 – 27 September, 2018) ; Kaunas University of Technology. - Kaunas, 2018 - P. 54. | ru |
| dc.identifier.uri | http://elib.gsu.by/jspui/handle/123456789/33112 | - |
| dc.language.iso | Английский | ru |
| dc.publisher | Kaunas University of Technology | ru |
| dc.title | Low-k sol-gel coating for surface planarization at integrated circuit production | ru |
| dc.type | Article | ru |
| dc.root | Inter-Academia 2018 : the 17th International Conference on Global Research and Education (Kaunas, Lithuania, 24 – 27 September, 2018) | ru |
| Appears in Collections: | Статьи | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Vaskevich_Low-k_sol-gel.pdf | 226.65 kB | Adobe PDF | View/Open |
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